High Precision Laser Manufacturing and Plasma Cleaning of Apertures in Toner Jet~(~R) Printheads

摘要

The TonerJet print process is based on toner transport through small apertures in flexible printed circuits, FPC:s. The transport is controlled by electrodes, that are etched into the flexible material. The print uniformity requirements have made it necessary to find a high precision manufacturing method for the apertures and the electrodes. Excimer laser aperture processing is the method used to achieve this. One of the main challenges has been the registration between the apertures and the electrodes. This has led to the development of a special masking method. Cleanliness of the FPC surface during the manufacturing process is of importance for uniformity and for the reliability of the insulating layers applied afterwards. Plasma cleaning was chosen due to its possibility to clean the inner walls of the apertures, and its lack of mechanical impact. A suitable cleaning cycle has been developed. Through this, a manufacturing method that is competitive regarding yield, cost and quality has been formed.