In this paper, a novel functional element integration method is proposed and demonstrated by highly miniaturized micro optical scanning sensor with dimensions of W2.0× L4.0×H2.8 mm{sup}3. In the sensor as small as a wheat grain, the functionalelements such as a laser diode(LD), photo detectors(PD's), a beam splitter, a ball lens, and a PZT thin-film actuator integrated optical scanner are integrated on separate substrates each consisting a functional module and the substrates are stacked. Andthe sensor is capable of multi-optical sensing: the 2D object shape recognition (+/- 10 degs scanning area for two direction) and the range measurement (50 mm +/- 10 mm with 0.5 mm resolution)
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机译：本文提出了一种新型功能元素集成方法，并通过高集小型微型光学扫描传感器，尺寸为W2.0×L4.0×H2.8mm {sup} 3。在作为小麦颗粒的传感器中，诸如激光二极管（LD），光探测器（PD），分束器，球透镜和PZT薄膜致动器集成光学扫描仪的功能形式集成在单独的基板上堆叠各自包括功能模块和基板。并且传感器能够多光学传感：2D物体形状识别（两个方向+/- 10次扫描区域）和范围测量（50 mm +/- 10 mm，分辨率为0.5毫米）
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