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Integration of Technical Support Into Manufacturing at IBM's 200-mm Wafer Facility

机译：在IBM的200毫米晶圆设施中将技术支持整合到制造中

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《IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop》|2001年||共3页
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McClure S.R.; Institute of Electric and Electronic Engineer;
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中图分类自动化技术、计算机技术;
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