The purpose of this study is to develop a mid-infrarated high dispersion spectrograph (IRHG) with high resolving power for astronomical observations. In this study, the authors proposed a method of grinding micro V grooves in brittle materials such as germanium and gallium arsenide using the cast iron bonded diamond grinding wheel, and investigated the grinding characteristics of this method. The wheel was trued using a method combining electro-discharge truing and mechanical truing employing abrasives. Grinding was performed by the electrolytic in-process dressing (ELID) grinding technique. Experiment results clarified that use of wheels with small abrasiveness improves the transferability of the cross-section profile of micro grooves, and curvature radius of about 15μm can be obtained with the use of the 20000 wheel.
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