首页>
外国专利>
A method for polishing a germanium surface by means of a mild combined chemical and mechanical polishing action, for use in the fabrication of microelectronic components
A method for polishing a germanium surface by means of a mild combined chemical and mechanical polishing action, for use in the fabrication of microelectronic components
展开▼
机译：一种通过温和的化学和机械结合抛光作用抛光锗表面的方法，用于制造微电子元件
展开▼
页面导航
摘要
著录项
相似文献
摘要
Polishing of a germanium surface includes a polishing operation with at least one polishing agent and a solution with a light attack of germanium.
展开▼
