ELID-grinding of microtool and applications to fabrication of microcomponents

摘要

A desktop fabrication system has been developed for advanced production shops, as an advanced micro-mechanical fabrication tool for producing advanced microcomponents. In this study, we developed a cylindrical grinding machine that employs the ELID technique, for use as a microtool. We also carried out detailed investigation on the performance of the electrode turning method of the ELID system; a microcylindrical shaft and microangular shaft were ground by the cylindrical grinding machine employing the ELID technique. Good dimensional accuracy was achieved.