Nanometer-scale scratching on the single-crystal silicon surface using an atomic force microscope

摘要

Nanometer-scale scratching on the polished Si (001) surface has been carried out by using an atomic force microscope with a three-sided pyramidal diamond tip. The minimum normal force which generates a reproducible groove on the Si (001) surface is approximately 50μN. The straight groove with a depth of 2 nm and a width of 100 nm is successfully generated at a normal force of 70μN. Then a fine letter "P" (scale: 1.2×1.2×0.15μm) is successfully written by mechanical scratching.