Effect of porosity on the optical properties of anodized porous silicon thin films

摘要

A systematic approach to the study of porous silicon (PS) films is presented in this paper. The study relates the effect of the anodization parameters on the index of refraction, the integrated reflectance, and thus, the porosity of the film. For a single layered film, the results show that the index of refraction decreases with increasing current density and anodization time. Both the film thickness and porosity are directly proportional to the current density applied and they increase withincreasing anodization time.