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Die cracking in flip chip assemblies

机译:倒装芯片组件中的模具开裂

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Die cracking is one of the crucial issues that influences the reliability of flip chip assemblies. As the demand for inputs/outputs escalates, the die size required to handle these demands has also increased. This, in turn, has resulted in higher stresses in the die. Die cracking depends on a combination of several factors. These include back side defects induced in silicon during wafer fabrication, defects induced on the sides of the silicon die during the dicing process and properties of the encapsulant. In addition, die cracking may also occur due to inequalities in the forces that are applied on the package, for example, as a consequence of thermal loads. This paper discusses the different modes of die cracking seen in high end flip chip applications. The 'backside' defects introduced during wafer fabrication act as sites for stress concentration, thereby initiating vertical die cracking when the package is subjected to thermal loading. As the stresses required to cause vertical die cracking in flip chip applications are high, horizontal die cracking is more commonly witnessed. The relationship between the critical tensile stress required to cause vertical die cracking and the maximum allowable size of the surface defects is quantitatively stated. Factors that can help reduce the incidence of die cracking are discussed. These include an improved dicing process, a reduction of 'back side' defects, a reduction in the mismatch of the coefficient of thermal expansion (CTE) between the various constituents of a flip chip assembly, and a decrease in the warpage of the package.
机译:模具开裂是影响倒装芯片组件的可靠性的重要问题之一。随着对输入/输出的需求升级,处理这些需求所需的芯片尺寸也增加了。这反过来导致模具中的较高应力。模具裂缝取决于几个因素的组合。这些包括在晶片制造期间在硅中引起的背面缺陷,在切割过程和密封剂的性质期间在硅模具的侧面上感应的缺陷。另外,由于在封装上施加在包装上的不平等,也可能发生模具开裂,例如,作为热负荷的结果。本文讨论了在高端倒装芯片应用中看到的模具裂纹的不同模式。在晶片制造期间引入的“背面”缺陷用作应力浓度的部位,从而在封装经受热负荷时启动垂直模裂。由于在倒装芯片应用中引起垂直管芯裂缝所需的应力是高的,因此更常见的水平模具开裂更常见。定量说明了引起垂直模裂裂缝所需的临界拉应力与表面缺陷的最大允许尺寸之间的关系。讨论了有助于减少模具开裂发病率的因素。这些包括改进的切割过程,减少了“背面”缺陷,减少了倒装芯片组件的各种组成部分之间的热膨胀系数(CTE)的不匹配,以及封装翘曲的减小。

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