We report on a hybrid coupling concept which allows high-density integration of top illuminated photodetector arrays with polymeric guided-wave based optical network components by means of a micromachined submount with an integrated mirror. The etching of a complementary alignment structure into the polymeric layer stack allows passive assembly with a 1.0 dB alignment tolerance range of about 40 /spl mu/m. A prototype 8-channel detector module integrated with a straight single mode polymeric waveguide array exhibited a coupling efficiency of about -7.7 dB and an average crosstalk value of -21.3 dB between adjacent channels at 1300 nm.
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机译：我们报告了一种混合耦合概念，其允许通过带有集成镜的微机械基站与聚合物导向波基光网络组件的高密度集成。将互补对准结构的蚀刻到聚合物层堆叠中允许被动组件具有约40 / SPL MU / m的1.0dB对准公差范围。与直单模聚合物波导阵列集成的原型8通道检测器模块在1300nm处表现出约-7.7dB的耦合效率约为-7.7dB，平均串扰值-21.3dB。
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