Evaluation of VOC Emissions From Clean room Materials Using New Chamber Test Method

摘要

Volatile organic compound (VOC) is one of the most important factors to control the chemical contamination in a cleanroom. Several methods for measuring VOC emissions from cleanroom materials have been developed. The chamber test method has been frequently used to evaluate VOC emission rate of cleanroom materials, but the result of this method is different from actual conditions (surface, airflow, temperature, humidity etc.). Then authors developed the new chamber which measures VOC emissions from only surface of cleanroom materials. The new chamber is no need to cut the material , so field measurements is possible. In this paper, evaluated the method of new chamber test and measured VOC emission rate from cleanroom materials.