MANAGEMENT DESIGN OF PROCESS EXHAUST SYSTEMS IN AN I/C MANUFACTURING ENVIRONMENT FOR EMISSION MINIMIZATION

摘要

This paper addresses process exhaust management from I/C manufacturing. It provides a guide to the facilities engineer or process exhaust system designer for understanding process exhaust systems and for achievement of emissions minimization at optimum cost. The emission sources, quantities emitted and characteristics of all exhausts are reviewed. Process exhaust treatment philosophy, including of Point-of-Use treatment devices, segregation of exhaust streams and End-of-Duct abatement systems are discussed for the purpose of facilitating selection and design of these systems.