Development and application of a fast solid-state potentiometric CO2-Sensor in thick-film technology

摘要

A solid-state potentiometric CO2 sensor of the type CO2, O2, Au, Li2CO3-BaCO3 | Nasicon | Na2Ti6O_(13)-TiO2, Au, O2, CO2 was fully manufactured in planar thick-film technology. On the rear side of the sensor substrate an integrated heater is applied. Thus, it is possible to operate the sensor as a stand-alone device. On the one hand, based on the special meander structure of the heater, a homogeneous temperature distribution on the sensor side can be obtained. And on the other hand, it is possible to operate the sensor with the ideal working temperature of 525 °C. At this temperature, the sensor signal follows the theoretical considerations and responds to the Nernst equation. That way, it is possible to use the sensor in different applications, for example to detect the CO2 concentration of human breathing air or to monitor the air quality in closed rooms.