An ideal MEMS parametric resonator using a tapered comb-drive

摘要

We present an ideal MEMS parametric resonator. The resonator is ideal in the sense that it is driven by modulation of a linear stiffness. The resonator is based on an electrostatic anti-spring which only effects stiffness, and in contrast to previous transducers, does not induce any other linear or nonlinear force. The significance of this work is that it allows, for the first time, to experimentally explore classic parametric resonators such as described by the Meissner equation. We present experimental results showing parametric excitation of a Meissner resonator, and characterization of the first unstable region of its stability map.