A Novel Design and Fabrication of Multichannel Microfluidic Impedance Spectroscopy Sensor for Intensive Electromagnetic Environment Application

摘要

The article reports about the design and fabrication of a novel multichannel microfluidic sensor which is capable to be employed in intensive electromagnetic environment where sensors are required to stand against strong external electromagnetic field with interference-free measurement results. Most impedance spectroscopy sensors use planar electrodes. Here a multichannel sensor based on Silicon/SU8 is created with top/bottom electrode design. All the contact pads, as signals shield contacts, ground electrodes are positioned on the same chip side for flip-chip attachment by solder process. The sensor chip includes four fluidic channels to analyze multicomponent mixtures by simultaneous measurement at different frequencies.