Surface characterization of microstructures on glass by atomic force microscopy and analytical scanning electron microscopy

摘要

Selective growth of silicon crystallites on glass, seeded by Si saturated metallic solution droplets is demonstrated. As a first result of this nuclei selection principle Si crystallites have been grown in dimensions of 10 #mu#m. The crystallites show good adhesion on borosilicate glass and are sufficiently regular arranged. To investigate the glass surface and the morphology of the Si structures as well as the local element content of the sample, atomic force microscopy (AFM) and analytical scanning electron microscopy (SEM) have been used. In addition, the depth profile of the structures can be studied by a combination of energy dispersive X-ray analysis (EDX) and focused ion beam treatment (FIB).