Debris-Free Liquid-Target Laser-Plasma X-Ray Sources for Microscopy and Lithography

摘要

We review the development of compact laser-plasma soft X-ray sources based on microscopic liquid drops or jets as target. It is shown that such sources provides debris-free, high-brightness, narrow-bandwidth operation at water-window wavelengths, making them suitable as compact sources for soft X-ray microscopy. Application of the method for proximity and projection lithography is also reviewed.