A STUDY ON ADHESION BETWEEN SELF-ASSEMBLED MONOLAYER AND THERMOPLASTIC POLYMER FILM IN NANOIMPRINT LITHOGRAPHY

摘要

In tins paper, the adhesion characteristics between self-assembled monolayers as an anti-sticking films and thermoplastic polymer films used in thermal nanoimprint lithography (NIL) are investigated experimentally. The SAMs are derived from fluoroalkylsilanes ((1H, 1H, 2H, 2H - perfluorooctyl) trichlorosilane (F{sub}13-OTS), (3,3,3-trifluoropropyl) trichlorosilane (FPTS)) and coated on stamp in vapor phase. The adhesion force between SAMs and polymer films is measured and the surfaces of stamp and polymer film after separation are observed in order to investigate the effect of SAMs on the reduction of adhesion and surface damage. The SAMs remarkably reduce adhesion force by one fifth and do not make any damages on the polymer film surface. It is also found that the anti-sticking film derived from FPTS which has shorter chain length than F{sub}13-OTS is less effective to reduce adhesion force than that derived from F{sub}13-OTS, but it does not make any damages on the surface of polymer films.