OPTICALLY TRAPPED MICROPROBE FOR NANO-PROFILE MEASUREMENT BASED ON INTERPOLATION METHOD OF STANDING WAVE SCALE USIGN CHROMATIC CONFOCAL SYSTEM

摘要

The improved nano-profile measurement technique by scanning an optically trapped microprobe is proposed, which is used as a sensor to read a standing wave scale (SWS) based on the interpolation method. An axial position of the optically trapped microprobe was measured using a chromatic confocal system to interpolate the SWS with high accuracy and high resolution. The length and the resolution of the interpolated SWS (iSWS) could be achieved 2.1 μm and 20 nm, respectively. In order to verify the validity of the proposed microprobe technique, the surface profile measurement of a glass small lens with accuracy higher than 50 nm was demonstrated.