Confocal optical system-based measurement apparatus and method for manufacturing confocal optical system-based measurement apparatus

摘要

A confocal optical system-based measurement apparatus includes: a light source; a light projecting optical fiber group; a light receiving optical fiber group; a spectroscope; and a confocal optical system configured to condense each of a plurality of beams from a plurality of light projecting optical fibers to irradiate a sample therewith, and cause a plurality of beams from a plurality of condensing points on the sample to form images on the plurality of light receiving optical fibers, respectively, wherein the light projecting optical fiber group includes the plurality of light projecting optical fibers configured to receive light from the light source, the light receiving optical fiber group includes the plurality of light receiving optical fibers configured to guide received light to the spectroscope, the shape of an end face of the light projecting optical fiber group and the shape of an end face of the light receiving optical fiber group are in a mirror image relationship, and in the light projecting optical fiber group and the light receiving optical fiber group, the shape of an end face of each light projecting optical fiber and the shape of an end face of a light receiving optical fiber corresponding thereto are in a mirror image relationship.