Simulation and modelling of thermo-pneumatic micropumps with HDLA

摘要

The simulation and modelling of silicon microsystems requires the use of tools at different levels of abstraction. The complexity of such systems does not permit the simulation of the complete microsystem at the physical level because of the coupled phenomena between signals of different nature (electrical, thermal, fluidic, etc.). We report how analog hardware description languages permit the modellization and simulation of thermo-pneumatic micropumps. The similarity of the mathematical descriptions of electrical and fluidic networks makes it possible to simulate them in a single package. The data for behavioural description of subcomponents have been extracted from finite element simulations and analytical formulae.