GA-based Computer Aided Autonomous Electromagnetic Design of Switched Reluctance Servomotor Drives

摘要

This paper presents an approach for GA-based computer aided autonomous electromagnetic design of Switched Reluctance servomotor drives. The proposed servomotor drive is designed for semiconductor device manufacturing equipment in a vacuum environment as an alternative to existing PM servomotor drives with rare-earth magnets. In the proposed design approach, three GA loops work to optimize the lamination design so as to meet the requirements for the target application under the given constraints while simultaneously fine-tuning the control parameters. Both the design results and the experimental studies using a 4-phase 8/6 400W prototype manufactured in accordance with the optimized design parameters show the validity of the proposed design approach.