In this paper, the doubly clamped microbeam-based resonator which actuated by two electrodes is investigated. A section parameter is proposed to describe the microbeam variables in the upper and under section. The differential equation is derived by considering the influence of neutral surface tension and the nonlinearity of electrostatic force. The Galerkin and Newton Cotes methods are used to obtain reduced-order model. The nonlinear vibration behaviors of system at equilibrium point are analysed. First, the frequency response is obtained by the method of multi-scale (MMS). The relationship between section parameter and mechanical property of the microresonator is studied. Then, the system is optimized by considering the relationship between section parameter and the actual physical parameters. Finally, the finite element method through COMSOL software is used to verify the theoretical results, and the two results are very close to each other in the stable region. The research results provide a good reference for the design of microresonator.
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