The rapid advancements in various current technologies and the constant trend in miniaturizing of components have created a need for higher cleanliness levels. Dust on the surface of IC components often affects their functions. Sometimes, it may damage the component. Therefore, the technology is necessary to remove effectively dust. In the present study, a vibration system, composed of a bolt-clamped Langevin transducer and a disc, was employed to study the effect of dust removal experimentally. When a flat board with calcium carbonate powder was irradiated by this focusing ultrasonic wave, the powder was diffused and removed completely. The experimental result indicates that: the higher input voltage of transducer, the higher removal efficiency.
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