Angular-selective cermet films produced from a magnetically filtered cathodic arc

摘要

Angular selective films have been reactively deposited onto an oblique glass substrate by vacuum arc evaporation. The deposition beam is magnetically filtered before striking the glass. The structure and optical properties of these films are discussed for targets of aluminum, chromium, and titanium at various partial pressures of oxygen and various final thicknesses. The most promising films are cermets, with aluminum giving superior angular selectivity for the deposition conditions studied. The angle of incidence dependence of solar and luminous transmittance is analyzed for some Al/Al$-2$/O$-3$/ films and their performance is compared to simple isotropic solar control films.