Effect of Electron Irradiation on MISFET Integrated Hydrogen Sensors

机译：电子辐照对MISFET集成氢传感器的影响

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The electron irradiation effect on hydrogen sensitivity of the integrated sensors based on MISFET has been investigated. The estimation of critical doses has been done according to developed models of hydrogen and radiation sensitivities of MISFET sensors.

机译：研究了基于MISFET的集成传感器氢敏感性的电子辐照效应。根据MISFET传感器的氢和辐射敏感性的开发模型进行了临界剂量的估计。

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《European Conference on Radiation and its Effects on Components and Systems》|2015年||共4页
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作者
Boris I. Podlepetsky;
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中图分类 TN014-53;
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Critical doses; Electron irradiation; Hydrogen sensors; MISFET;

机译：临界剂量;电子照射;氢传感器;MISFET;

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专利

1. Effect of irradiation on hydrogen sensors based on MISFET [J] . B.I. Podlepetsky Sensors and Actuators . 2017,第jana期

机译：辐照对基于MISFET的氢传感器的影响
2. Responses' parameters of hydrogen sensors based on MISFET with Pd(Ag)-Ta_2O_5-SiO_2-Si structure [J] . Podlepetsky B., Samotaev N., Kovalenko A. Sensors and Actuators . 2019,第JULa期

机译：Pd（Ag）-Ta_2O_5-SiO_2-Si结构的基于MISFET的氢传感器的响应参数
3. Responses' parameters of hydrogen sensors based on MISFET with Pd(Ag)-Ta_2O_5-SiO_2-Si structure [J] . Podlepetsky B., Samotaev N., Kovalenko A. Sensors and Actuators . 2019,第Jula期

机译：基于PD（AG）-TA_2O_5-SIO_2-SI结构的MISFET的氢传感器参数的回应
4. Effect of Electron Irradiation on MISFET Integrated Hydrogen Sensors [C] . Boris I. Podlepetsky European Conference on Radiation and its Effects on Components and Systems . 2015

机译：电子辐照对MISFET集成氢传感器的影响
5. Dimensionality aspects of nano micro integrated metal oxide based early stage leak detection room temperature hydrogen sensor. [D] . Deshpande, Sameer Arun. 2007

机译：基于纳米微集成金属氧化物的早期泄漏检测室温氢传感器的尺寸方面。
6. Performance Degradations of MISFET-Based Hydrogen Sensors with a Pd-Ta2O5-SiO2-Si Structure During Long-Term Operation [O] . Boris Podlepetsky, Nikolay Samotaev, Marina Nikiforova, 2019

机译：Pd-Ta2O5-SiO2-Si结构的基于MISFET的氢传感器在长期运行过程中的性能下降
7. Effect of Irradiation on Hydrogen Sensors Based on MISFET [O] . Podlepetsky B.I. 2015

机译：基于MISFET的辐照对氢传感器的影响
8. Amorphization of Zr3 Al by Hydrogenation and Subsequent Electron Irradiation. [R] . Meng, W. J., Koike, J., Okamoto, P. R., 1988

机译：通过氢化和随后的电子辐照使Zr3al非晶化。

Effect of Electron Irradiation on MISFET Integrated Hydrogen Sensors

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