A novel diffraction spectroscopic instrument comprising two focusing multilayer mirrors (MMs) at near-normal incidence and a conventional blazed plane grating at grazing incidence has been implemented. A nearly perfect stigmatism and a theoretical resolving power above 6 $MUL 10$+4$/ are due to the separation of the focusing and dispersing functions. For higher throughput, MMs with nearly identical resonance reflection curves around $lambda$-0$/ $APEQ 135 angstroms have been synthesized employing a magnetron ion sputtering source. The instrument performance has been assessed using a laser-plasma XUV radiation source. The spectral resolution in excess of 4 $MUL 10$+3$/ and the applicability to space-resolved spectroscopy and plasma diagnosis have been demonstrated.
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机译:已经实施了一种新的衍射光谱仪,其包括在近常发射和在放牧入射时处于近似正常入射和传统的闪光平面光栅的聚焦多层镜(MMS)。一个近乎完美的耻辱和理论上的解决能力超过6 $ MUL 10 $ + 4 $ /是由于聚焦和分散功能的分离。对于较高的吞吐量,已经合成了具有磁控离子溅射源的磁控离子溅射源的几乎相同的谐振反射曲线MMS。使用激光等离子体XUV辐射源评估仪器性能。已经证明了超过4 $ MUL 10 $ + 3 $ /以及适用于空间解决光谱和血浆诊断的适用性。
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