Eliminating system errors of a large-aperture and high-sensitivity moire deflector by real-time holography

摘要

The design principles of a large-aperture high-sensitivity and high-precision moire deflector in which two error-correction methods of real-time holography are used to make grating are presented. Theories and experiments show that this moire deflector has high sensitivity and high precision in measurement, and its system errors are eliminated.