Semiwafer metrology project

摘要

A wafer metrology 'round robin' has been completed comparing linewidth measurements from several different companies and different measurement tools and technologies. The project has been conducted under the auspices of SEMI by members of SEMI's Metrology Committee. The goals of the program were: (1) determine the range of critical dimension values measured across the United States, (2) test the newly formulated SEMI linewidth patterns, (3) assess the effect of calibration differences of the measured values.