Temperature Characteristics of Pure Shear Mode FBARs Consisting of (1120) Textured ZnO Films

摘要

Thickness extensional mode FBAR consisting of (0001) textured ZnO films and pure thickness shear mode FBAR consisting of (1120) textured ZnO films were fabricated. Temperature coefficients of frequency (TCF) of these FBARs were measured in the temperature range of 10-60°C. In both of the resonators, the parallel resonant frequencies varied linearly with temperature. The TCF were determined as -63.1 [ppm/°C]for thickness extensional mode resonator and -34.7 [ppm/°C] for pure-shear mode resonator.