Characteristics of (101~0) and (112~0) textured ZnO piezofilms for a shear mode resonator in the VHF-UHF frequency ranges

摘要

This paper reports the fabrication and characterization of ZnO piezoelectric thin films in which the crystallite c-axis is unidirectionally aligned in the plane. The films were deposited by a conventional radio frequency (RF) magnetron sputtering apparatus without epitaxy. We have measured reflection coefficient S/sub 11/ of the ZnO film/glass substrate composite shear mode resonator and confirmed that the resonator excites shear wave only in the very high frequency to ultra high frequency ranges (VHF-UHF). The crystallites c-axis orientation and alignment were determined by X-ray diffraction (XRD) patterns, /spl phi/-scan pole figure analysis, /spl omega/-scan rocking curves, and atomic force microscope (AFM) measurement. The transduction of the shear wave showed good agreement with properties of the crystallite alignment in the film.