Accelerated testing of silicon dioxide wearout

摘要

Oxide lifetime extrapolation using log(tBD) or better log(QBD) against 1/ Eox plot is more accurate and has a theoretical basis. Highly accelerated oxide test completed in seconds appears to be feasible. The acceleration factor is also a function of the severity of the oxide defect. Extrapolation of defect-related break-down lifetime can be performed assuming an effective oxide thinning for defects.