Beam shaping and power handling of an SLM system for LIPSS texturation

摘要

Laser InducedPeriodicSurfaceStructuringis a powerful tool for creating sub-micrometric fea-tures on large surfaces in an up-scalable and industrial way. In order to control the process and reach a sufficient uniformity for some applications a careful attention must be paid to the control of the la-ser beam parameters likeits polarization, stability and shape. A uniform beam shape is mandatory in some cases.Although some demonstrationsof beam shapingwithhigh power handlingoptical componentshave been made, there is not much reported regarding the use of SLM(Spatial Light Modulator)for beam shaping of ultrashort pulses. In the current work we show the possibility to use SLM with different type of laser sources, including a femtosecond system delivering up to 1 mJ per pulses.