Beam Shaping and Power Handling of an Spatial Light Modulator System for Laser Induced Periodic Surface Structuring Texturation

摘要

Laser Induced Periodic Surface Structuring (LIPSS) is a powerful tool for creating submicrometric features on large surfaces in an up-scalable and industrial way. In order to control the process and reach a sufficient uniformity for some applications a careful attention must be paid to the control of the laser beam parameters like its polarization, stability and shape. A uniform beam shape is mandatory in some cases. Although some demonstrations of beam shaping with high power handling optical components have been made, there is not much reported regarding the use of SLM (Spatial Light Modulator) for beam shaping of ultrashort pulses. In the current work we show the possibility to use SLM with different type of laser sources, including a femtosecond system delivering up to 1 mJ per pulses.