Highly Integrated Ultra-sensitive Silicon Disk Micro Resonator for Trace Amount of Chemicals Detection

摘要

Highly integrated silicon disk micro resonator with excellent quality factor, 1319 in air, was developed in this work for trace amount of chemicals detection. On resonator integrated piezoelectric PZT thin film enables low driving voltage (～0.2V), good impedance matching with ICs and self actuation self sensing capability. The energy dissipation and other negative effects from PZT electrode stack were successfully compressed by refining the resonator's geometry. The proposed resonator is promising to wireless sensor network for human healthcare applications.