High Performance Nitrogen Dioxide Sensors with Sulfur Doped Graphene And Micro-Hotplatform

摘要

Nitrogen dioxide sensors with ppb level sensitivity and fast response and recovery were developed by integrating sulfur doped graphene with micro-hotplatform. Sulfur was doped in graphene after its transfer onto the micro-hotplatform through chemical vapor deposition at 500°C. The sensors were sensitive to 5 ppb nitrogen dioxide at room temperature. With the help of heater integrated in MHP, the sulfur doped graphene sensors could quickly recover to the baseline within 5 min. The sensors described here were very promising for practical applications.