Multi-layer Lamination of Embedded Channels in Low Shrinkage Ceramics based Platform

摘要

Multi-layer lamination with carbon fugitive material to realize embedded channels in low shrinkage LTCC laminates was investigated. The sagging behaviors of suspended LTCC laminates over the cavity after lamination and co-firing were studied. Suspended LTCC laminates over the channels of width 1 to 10 mm were dimensionally stable after sintering with maximum deflection of less than 20 μm. Swelling (i.e. deflection in the opposite direction of sagging) was observed for suspended LTCC laminates over the channels of width 15 to 30 mm after co-firing. The LTCC material and carbon burnout behavior were characterized using thermal analysis techniques. Based on the thermal analyses, a multi-step burnout process was proposed to control the carbon burnout in realizing dimensionally stable embedded channels.