Structural Features of Carbon Nitride Nanocolumnar Films after Nanosecond Pulsed Laser Annealing in a Supercritical Fluid

摘要

The effect of pulsed laser irradiation on the structural properties of nanocolumnar CNx:O films in dependence on the intensity of laser pulses and film density have been investigated. The laser annealing was carried out for carbon-nitride films placed in a liquid. The structural changes in nanocolumnar CNx:O films after the influence of pulsed laser irradiation have been determined by Raman spectroscopy. It was found that after annealing procedure the nitrogen/carbon ratio in the films increases under the laser irradiation intensity increase. It has been established by the methods of scanning electron microscopy and Raman spectroscopy that efficiency of the laser annealing for structural changes depends on the density of the nanocolumnar structures.