Diamond-like Carbon Coating in Improving the Perfomance of II-VI Devices

摘要

The primary goal of this paper is to highlight our achievement in the synthesis, characterization and application of DLC films for II-VI-based radiation detector improvement. “Soft” polymer-like a-C:H:N films with a stable adhesive contact to substrate, which is achieved both by lowering in the film stress, and by the additional treatment of the substrate surface with argon plasma, were obtained by PECVD method. We considered ways to adjust the properties of carbon-based materials to create an optical or protective coatings and applied a-C:H:N film as a passivation coating of IR and gamma radiation detectors based on II-VI materials.