Fundamental evaluation of semiconductor waveguide-type in-linewavelength selective filter with Fabry-Perot etalon resonator

摘要

As compact filtering devices easily integrated with semiconductorwaveguides and also for the application to a multi-wavelength lightsource, we fabricated an InGaAsP/InP semiconductor waveguide-typein-line wavelength selective filter with a Fabry-Perot etalon resonator.A filtering effect was obtained with an almost-designed transmissionwavelength interval of 0.8 nm. Fundamental characteristics of thefabricated devices were evaluated, and structures to improve thecontrast ratio are discussed