A Rh/Au/Rh rigid air-bridge interconnection technique forultra-high speed GaAs LSIs

摘要

A rhodium/gold/rhodium (Rh/Au/Rh) air-bridge interconnection hasbeen developed for applying to ultra-high-speed GaAs LSIs. Thisstructure is suitable for forming a mechanically strong air-bridgeinterconnection, which enables an interconnection length to be expandedwithout many support-pillars, compared with a gold air-bridgeinterconnection. This contribution of the air-bridge interconnection tototal propagation delay time in a GaAs LSI chip is quantitivelyinvestigated. It is found that applying the air-bridge interconnectionto a GaAs LSI with 10 K-gate complexity causes total delay time to bereduced to 65%, compared with the conventional interconnection