Manufacturing technology and yield studies for MMIC 5-bit digitalattenuators and phase-shifters

摘要

Design and manufacturing approaches for highly reproducible,digitally controlled GaAs MMIC 5-bit attenuators and phase-shifters arepresented. A computer-aided automated DC measurement procedure isdeveloped to 100% test all devices and produce a full-wafer yield map.Statistical process control using a computerized wafer tracking systemresulted in a number of process improvements, a considerable yieldenhancement with DC yields exceeding 70%, and increased waferthroughput. Good chip-to-chip performance uniformity is obtained, whichmakes the MMICs suitable for insertion in a Ku-band transmitphased-array antenna