Theoretical and experimental studies of micromachined hot-wireanemometers

摘要

A new type of micromachined and batch-fabricated hot-wireanemometers has been developed. The systematic characterization of thesedevices, especially of the steady-state characteristics, frequencyresponse, and directional dependence are presented. These micromachinedanemometers can perform better than conventional ones because of theirextremely small size. It is demonstrated that a 10 μm long, 1 μmwide, and 0.5 μm thick polysilicon hot wire can have a unprecedentedbandwidth of 1.4 MHz in constant-temperature mode