CMOS-based technology for integrated optoelectronics: a modularapproach

摘要

The optoelectronic version of an existing industrial 2 μm CMOSprocess has been developed. With the new technology, single mode stripwaveguides, photodiodes and waveguide-to-photodiode couplers have beenintegrated together with standard CMOS devices. Thanks to a modularapproach, the properties of the core process have not been altered. Thebandwidth of the basic system, consisting of a curved waveguide coupledto a photodiode and a transimpedance amplifier, is higher than 1.5 MHzat a wavelength of 780 nm. As an example, an unbalanced interferometerwith on-chip amplifier has been qualified