A flat plane slider for a surface acoustic wave (SAW) motor has been enabled by using a chemically reduced lithium niobate stator. Since a slider with no projections or the flat plane slider can drive with higher preload than a slider with projections, it is expected to obtain a higher output force. In this paper, driving properties such as a no-load speed characteristic and output force characteristic of the flat plane slider was measured. The SAW motor with the flat plane slider achieved 18 N high output force and 0.9 m/s no-load speed.
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机译：通过使用化学还原的铌酸锂定子，已启用了用于表面声波（SAW）电机的平面滑块。由于没有突起的滑动器或平面滑动器可以比具有突起的滑动器以更高的预紧力驱动，因此期望获得更高的输出力。在本文中，测量了诸如平板滑块的空载速度特性和输出力特性之类的驱动特性。带有平面滑块的SAW电机可实现18 N的高输出力和0.9 m / s的空载速度。
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