A flat plane slider for a surface acoustic wave (SAW) motor has been enabled by using a chemically reduced lithium niobate stator. Since a slider with no projections or the flat plane slider can drive with higher preload than a slider with projections, it is expected to obtain a higher output force. In this paper, driving properties such as a no-load speed characteristic and output force characteristic of the flat plane slider was measured. The SAW motor with the flat plane slider achieved 18 N high output force and 0.9 m/s no-load speed.
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