Simulation of surface acoustic wave motor with spherical slider

摘要

The operation of a surface acoustic wave (SAW) motor usingnspherical-shaped sliders was demonstrated by Kurosawa et al. (1994). Itnwas necessary to modify the previous simulation models for usualnultrasonic motors because of this slider shape and the high frequencynvibration. A conventional ultrasonic motor has a flat contact surfacenslider and a hundredth driving frequency; so, the tangential motionncaused by the elasticity of the slider and stator with regard to thenspherical slider of the SAW motor requires further investigation. Innthis paper, a dynamic simulation model for the SAW motor is proposed.nFrom the simulation result, the mechanism of the SAW motor was clarifiedn(i.e., levitation and contact conditions were repeated during thenoperation). The transient response of the motor speed was simulated. Thenrelationships between frictional factor and time constant and vibrationnvelocity of the stator and the slider speed were understood. Thendetailed research regarding the elastic deformation caused by preloadnwould be helpful to construct an exact simulation model for the nextnwork