High Performance High Density Gas-FET Array in Standard CMOS

摘要

New gas sensitive FET (Gas-FET) structures are proposed to enable standard CMOS fabrication of high performance high density gas sensor arrays that are fully integrated with their associated circuitry. The performance of the proposed Gas-FET structures was investigated by fabricating an 8×8 Gas-FET array comprising 45μm×46μm sensing elements. Room temperature sub-ppm acetone sensing capability is demonstrated for non-invasive diabetes diagnosis through exhaled human breath. Performance comparison shows that the fabricated array boasts superior sensitivity while enabling ultra-low power operation at room temperature, with over 3 orders magnitude reduction in power consumption compared to previously reported standard CMOS resistive gas sensors.