3D sequential stacked planar devices on 300 mm wafers featuring replacement metal gate junction-less top devices processed at 525°C with improved reliability

摘要

3D sequential integration requires top MOSFETs processed at low thermal budget, which can impair the device reliability. In this work, top junction-less device are fabricated with a maximum processing temperature of 525°C. The devices feature high k /metal replacement gate and low temperature Si:P and SiGe:B 60% raised SD for NMOS and PMOS respectively. Device matching, analog and RF performance of the top tier devices are in-line with state-of-the-art Si technology processed at high temperature (>1000°C). The top Si layer is transferred on CMOS planar bulk wafers with W metal-1 interconnects, using a SiCN to SiCN direct wafer bonding.