Transparent conducting CuCr_(1-x)Mg_xO_2 films prepared by pulsed laser deposition

摘要

Transparent conducting CuCr_(1-x)Mg_xO_2 thin films were prepared by pulsed laser deposition (PLD) from polycrystalline CuCr_(1-x)Mg_xO_2 targets. The derived CuCr_(1-x)Mg_xO_2 films were highly c-axis oriented deposited at higher substrate temperature. The micro structural, electrical as well as optical properties were studied. It was found that the films were relatively smooth, and behaved as semiconductors. The transmittances of the films in the visible region are about 80% with direct band gaps about 3.15eV. The results suggested that CuCr_(1-x)Mg_xO_2 films could be successfully prepared by PLD, which can broaden the applications of the transparent conducting oxides films.